噴涂硅鋁靶材 Spray SiAl Target

產(chǎn)品說(shuō)明Product description

以等離子體為熱源，在大氣環(huán)境下通過(guò)一定的氣氛保護(hù)裝置，將Si+Al粉末加熱到熔融或半熔融狀態(tài)并高速?zèng)_擊背管表面形成致密涂層，從而制備出高純度、低氧含量、高致密度SiAl靶材。
With plasma as the heat source, high purity, low oxygen content, high density SiAl targets are produced by using Si and Al powders. The starting Si and Al powders are heated to molten or semi-molten state with the protection of certain atmosphere and sprayed on the surface of backing tube at high speeds to form dense coatings.

背管材質(zhì) Backing tube

-選用304/316L不銹鋼（無(wú)磁）

304/316L stainless steel (non-magnetic)

靶材尺寸Dimension

-按照?qǐng)D紙要求加工 

According to customized drawings

應(yīng)用領(lǐng)域Applications

-用于制作SiO₂膜、Si₃N₄膜，主要用于光學(xué)玻璃AR膜，LOW-E鍍膜玻璃，半導(dǎo)體電子器件，TFT-LCD，平面顯示，觸摸屏玻璃。

For deposition of SiO₂ and Si₃N₄ films, which are used for AR films of optical glasses, LOW-E glasses, electronic devices, TFT-LCD, flat panel screens, touch screen glasses.