The X-Prep? Vision? is a metrology tool that enables measurement of silicon and semitransparent substrates. It is necessary for applications that require uniform thinning to a specific target with a tolerance of +/- 3 μm or better.

The X-Prep? fixture adapter is also secured to the motorized stage on the X-Prep? Vision?, ensuring the measurement/tool control coordinates remain aligned when transferred between systems. 
A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.

Meaurement & Observation - How it Works
IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.

Meauring Below 10 μm Thickness
For applications requiring thinning to less than 10 μm, precise measurement is possible only by adding the visible light spectrometer accessory.

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